MEMS Consortium Picks Intellisense

WILMINGTON, Mass. -- Corning IntelliSense Corporation, a subsidiary of Corning Incorporated (NYSE: GLW - News), announced today that it has been chosen to manufacture MOEMS (Micro-Opto-Electro-Mechanical Systems) devices by a consortium led by Xerox Corporation. The consortium, which also includes Microscan Systems, Inc., and Coventor, Inc., is part of a 14 million dollar five-year cost-shared NIST (National Institute of Standards and Technology) Advanced Technology Program formed in 1998. The focus of the consortium is the development of a robust, low-cost process for the efficient manufacture and rapid commercialization of MOEMS for use in telecommunications, imaging, medicine, entertainment, and information systems. Additional support for the project comes from the Cornell Nanofabrication Facility and the Rochester Institute of Technology's Semiconductor & Microsystems Fabrication Laboratory. "A key goal of the project is to investigate the MEMS process technology necessary to enable optical MEMS with extremely flat mirror surfaces," said Dr. Edwin Carlen, MEMS development engineer at Corning IntelliSense. "We needed a MEMS manufacturing partner who could quickly develop and implement a broadly enabling manufacturing process, and Corning IntelliSense, with their full-featured foundry and years of MEMS experience, was the obvious choice," commented Joel Kubby, manager, Xerox Microsystems Group, Xerox Wilson Center for Research & Technology. Corning IntelliSense Corp.