Etec, Umech Join on MEMS

PEABODY, Mass. -- Etec, Inc. and Umech Technologies, LLC. announced today that they have entered into a joint product agreement to develop next generation MEMS test systems. The new product line will incorporate an enhanced version of Etec’s MEMS Motion Analyzer (MMA), engineered by Umech. It will also utilize Etec’s M/STeP integrated hardware/software test environment. An integrated semi-automatic wafer probe station gives the system the ability to measure wafer-level MEMS devices. The line is targeted at pilot and low volume production applications, as well as analytical applications requiring the testing of unpackaged (wafer-level) devices.As part of the agreement, Etec has been granted exclusive worldwide distribution of Umech’s embedded version of the MMA (known as EMMA) product line for measuring dynamic micro-motions of MEMS/MOEMS structures. This innovative system combines video microscopy, stroboscopic illumination and proprietary algorithms to visualize and analyze the motions of entire microstructures and arrays of microstructures. The system can simultaneously acquire data in three dimensions and six degrees of freedom with sub-nanometer resolution. “This joint product agreement is another key step in Etec’s strategy to offer solutions to all segments of the MEMS test market. Etec now offers the continuum of test solutions from R&D to full-scale production. We have robust test solutions for VOAs (Variable Optical Attenuators), OXCs (Optical Cross Connects), optical switches, and Micro-mirror Arrays as well as a variety of electro-optical component used in DWDM applications.”, stated Dr. Thomas A. Cellucci, Etec, Inc. President and CEO. “Umech is the established leader in MEMS metrology and characterization, and Etec is the established leader in automated MEMS/MOEMS test solutions. Our joint product agreement is another key step in joining forces to offer the highest performance solutions for MEMS/MOEMS test and characterization to both the R&D and production markets”, commented Dr. Michael Mermelstein, Umech Technologies, LLC’s PresidentEtec Inc.Umech Technologies LLC