Philips Analytical Struts Its Stuff

ALMELO, The Netherlands -- A spectrum of ‘Advanced Metrology Solutions’ is being shown by Philips Analytical at this year’s Semicon Japan (December 5-7, 2001, Booth 3-A502). Star of the show is the company’s new and advanced PQ Emerald 200B, which takes in-line metal thickness measurements of ultra-fine-line copper pads and arrays to incredible depths. Also on show is the company’s PW2830 wafer analyzer, PZ2000 laser ellipsometer, X’Pert PRO MRD X-ray diffraction system, and PQ Diamond software package. The company’s entire semiconductor metrology range includes opto-acoustic equipment for metal films, ellipsometry and reflectometry for dielectric films, X-ray fluorescence for oxides, metals and polysilicon, photoluminescence for bandgap engineered materials, and X-ray diffraction for epitaxy control. Philips Analytical