Etec Introduces MEMS Analyzer

PEABODY, Mass. -- Etec, Inc. announced today the introduction of its new MEMS Motion Analyzer system. The MEMS Motion Analyzer is a turnkey system for characterizing the complex motions of MEMS/MOEMS. An essential tool for the MEMS development lab, the system can measure motions in 6 degrees-of-freedom, with nanometer resolution, at frequencies from 1 Hz to 10 MHz. The MEMS Motion Analyzer combines video microscopy, stroboscopic illumination, and proprietary algorithms to analyze the motions of individual microstructures, or arrays of microstructures, simultaneously. Engineers and researchers can test and characterize the complex motions of virtually any MEMS/MOEMS device, including variable optical attenuators (VOA), optical switches, optical cross connects (OXC), and 2-D and 3-D micro-mirror arrays. The system can readily analyze performance characteristics such as resonant behavior, transient response, settling time, switching time, and complex motion profiles; all with simple point-and-click operation.

The MEMS Motion Analyzer incorporates powerful data analysis and report generation tools, enabling clear presentation of complex motion data. Reports summarize frequency response and motion data for in-plane and out-of-plane motions. Real-time slow motion video provides a visual display of the MEMS motion in 3-dimensions.

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