Umech, Etec Unveil MEMS Tester

Enhanced MEMS Motion Analyzer-Generation 2 enables measurement of 3-dimensional motion of MEMS and other microstructures

February 4, 2003

1 Min Read

WATERTOWN, Mass. -- Umech Technologies, LLC and Etec, Inc. announced today the availability of the enhanced MEMS Motion Analyzer-Generation 2 (MMA G2). The MMA G2 enables researchers to characterize and measure the 3-dimensional motion of MEMS and other microstructures with sub-nanometer resolution, and provides real-time imaging. Umech Technologies pioneered commercial MEMS motion analysis with the original development of the MMA product line. Etec, Inc. of Peabody, MA, distributes the MMA G2 to the worldwide market. Building upon the original MMA, the MMA G2 provides additional features that give MEMS researchers and device processors greater testing capability and flexibility. Specific improvements include:- Higher sensitivity, higher speed 1.3 mega-pixel imaging system allows rapid data acquisition and wide field of view.
- Multiple magnification (4) lens "turret" allows rapid target identification and measurement.
- Higher speed sampling rates and multi-channel stimuli allows complex MEMS to be characterized.
- Order of magnitude increase in sampling of complex trajectories. - Networked instrument operation and expanded reporting allow remote use and data analysis.
- Scripting options for custom test routines in production or R&D environment. Dr. Michael Mermelstein, President of Umech Technologies commented; " the MMA G2 represents a continuation of our leadership in the field of MEMS motion analysis."Umech Technologies LLCEtec Inc.

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